Incamake y'umukozi urwanya foto
Photoresist, izwi kandi nka photoresist, yerekeza ku bikoresho bito bito bifite firime ihinduka iyo bihuye n'urumuri rwa UV, imirasire ya electron, imirasire ya ion, imirasire ya X, cyangwa indi mirasire.
Igizwe na resin, fotoinitiator, solvent, monomer, n'ibindi bikoresho (reba Imbonerahamwe ya 1). Resin na fotoinitiator ni byo bintu by'ingenzi bigira ingaruka ku mikorere ya fotoini. Ikoreshwa nk'igitambaro cyo kurwanya ingese mu gihe cyo gufotora.
Mu gutunganya ubuso bwa semiconductor, gukoresha icyuma gipima neza ubushyuhe bishobora gukora ishusho wifuza ku buso.
Imbonerahamwe ya 1.
| Ibikoresho byo kurwanya umwijima | Imikorere |
| Umushongi | Ituma ubwiyongere bw'ubushyuhe buhinduka amazi kandi buhindagurika, kandi nta ngaruka igira ku miterere ya shimi ya ubwiyongere bw'ubushyuhe. |
| Igitera inkunga (photoinitiator) | Bizwi kandi nka photosensitizer cyangwa igikoresho gikosora urumuri, ni igice cy’umubiri gishobora kwibasira urumuri mu bikoresho birwanya urumuri. Ni ubwoko bw’ikintu gishobora kubora kikavamo radicals cyangwa cations zidafite ubuziranenge hanyuma kigatangira gukora imikorere ya chemical cross-linking muri monomers nyuma yo kwinjiza ultraviolet cyangwa ingufu z’urumuri zigaragara z’uburebure runaka bw’umurambararo. |
| Resin | Ni polimeri zidakora neza, kandi zikora nk'ibifunga bifatanya ibikoresho bitandukanye muri fotoresiste, biha fotoresiste ubushobozi bwayo bwa mekanike n'ubutabire. |
| Monomer | Bizwi kandi nk'ibinyabutabire bikora, ni molekile nto zirimo amatsinda y'imikorere ashobora gukoreshwa mu gupima kandi ni ibintu bifite uburemere buke bwa molekile bishobora kugira uruhare mu gukora resins zifite uburemere bwinshi bwa molekile. |
| Inyongeramusaruro | Ikoreshwa mu kugenzura imiterere yihariye y'ibinyabutabire bya photoresists. |
Abafotoresiste bashyirwa mu byiciro bibiri by'ingenzi hashingiwe ku ishusho bakora: nziza n'iy'ububi. Mu gihe cyo kwihagararaho, nyuma yo kwihagararaho no gukura, ibice byagaragaye by'igitambaro birashonga, bigasiga ibice bitagaragara. Iki gitambaro gifatwa nk'ikirwanya ububi. Iyo ibice byagaragaye bigumyeho mu gihe ibice bitagaragara bishonga, igitambaro gifatwa nk'ikirwanya ububi. Bitewe n'aho urumuri ruturuka n'aho imirasire ituruka, abafotoresiste bashyirwa mu byiciro nka UV (harimo abafotoresiste ba UV beza n'ababi), abafotoresiste ba UV (DUV), abafotoresiste ba X-ray, abafotoresiste ba electron beam, na abafotoresiste ba ion beam.
Photoresist ikoreshwa cyane cyane mu gutunganya imiterere myiza mu matsinda yo kwerekana, imiyoboro ivanze, n'ibikoresho bya semiconductor bitandukanye. Ikoranabuhanga ryo gukora photoresist riragoye, rifite ubwoko butandukanye bw'ibicuruzwa n'ibipimo. Inganda zikora imiyoboro ivanze zishyiraho ibisabwa bikomeye kuri photoresist ikoreshwa.
Ever Ray, uruganda rufite uburambe bw'imyaka 20 rwibanda ku gukora no guteza imbere resins zishobora kuvurwa, rufite ubushobozi bwo gukora toni 20.000 buri mwaka, rufite umurongo wuzuye w'ibicuruzwa, ndetse n'ubushobozi bwo guhindura ibicuruzwa. Muri photoresist, Ever Ray ifite resins 17501 nk'igice cy'ingenzi.
